SPM Piezo Stage Controller EG3000

SPM Piezo Stage Controller EG3000

SPM Piezo Stage Controller EG3000

SPM Piezo Stage controller EG3000 is designed to control  SPM or scanning confocal microscope. Controller provides data acquisition from internal sensors and external devices, applies control voltage to scanners piezoelectric actuators. All acquired information is transferred to PC workstation for visualization and processing.

One of the most important parts of the EG3000 controller is closed loop feedback system realized by means of 20-bit TDC (Time-to-Digital Convertion) to measure displacement capacitance sensors. Controller is capable to operate 6 channels with feedback simultaneously, which allows to independently scan with tip and sample both.

Any available system signal can be used for SPM feedback.

EG3000 SPM controller contains 2-channel lock-in amplifier to provide resonant SPM techniques, for example non-contact SPM mode. Lock in amplifier includes high stable voltage generator based on digital frequency synthesizer. High speed data processing is implemented using programmable logic (FPGA). This allows to perform high quality lock-in detection up to 1.5 MHz band.

Piezo controller diagram

Piezo controller diagram

EG3000 has multi channel (up to 12) control for stepper motor with micro step option, for example, for adjustment of scanning head (stage).

Controller has analog inputs and outputs for external equipment connections, synchronization inputs and outputs and USB interface for connection with PC. Controller is managed with NSpec software.


SPM Piezo Stage Controller EG3000 drawing

Controller datasheet.



Specification of EG3000:

General characteristics
CPU 32 bit; RISC
PC Interface USB 2.0
PC Interface RS 232, RS485, SYNC I/O
High-voltage outputs
Voltage -10..150 V
Noise < 5 ppm
Number of channels 3 or 6
Resolution (digital-analog converters) 18 bit
Stepper motors control unit
Number of channels 4/8/12
Power supply 24V, 3A
Microstepping mode support 1/1, 1/2, 1/4, 1/16 step
Lock-in amplifier
Number of channels 2
Preamplifier gain 1-100
Input voltage range ±10 V
ADC resolution 16 bit
Frequency range of input signals 0-1,2 MHz
Frequency range of main oscillator 10 Hz – 3 MHz
Output voltage amplitude 0 mV-10 V
Frequency  stability < 5 ppm
Additional channels ADC / DAC
Number of input channels 2
Voltage Range ±10 V
ADC resolution 16 bit
Number of output channels 2
Voltage range ±10 V
DAC resolution 16 bit

Ordering information:

Part number Description Price
EG3000 SPM Piezo Stage Controller