3D plane-parallel Nanopositioning Stage NPS20020Z-A

Nano piezo positioning stage NPS20020Z

Nano piezo positioning stage NPS20020Z-A

NPS20020Z-A – basic model of a nano piezo scanning stage. NPS20020Z-A piezo stage are capable of moving the objects with sub-nanometer precision. Their unique feature is a large aperture (45 mm in diameter) in the center while outer dimensions are only 100х100 mm. This could be useful in applications require clear optical path in the center of the stage.

Piezo stages are made of solid metal bar processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. NPS stage design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

NPS20020Z-A multi-axes scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control NPS20020Z-A piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.

Applications of NPS20020Z-A include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

Nano-piezo-positioning-stage-NPS20020Z-A drawing

Double Cap Technique is used, which greatly improves sensors quality.




Parameters NPS20020Z-A
XY travel range (Closed-Loop), µm 200×200
Z range (Closed-Loop), µm 20
Resonant frequency XY, kHz 1
Resonant frequency Z, kHz 3
Minimum scan step, nm 0.1
Angle tilting over the full range, nm < 0.01°
Maximum scanning speed, Hz (line/sec) 10
Base sample weight, g 100
Operating temperature range at -40°C to 80°C
Dimensions, mm 100×100×35
Clear aperture diameter, mm 45
Material Aluminium


Ordering information:

Part number Description Price
NPS20020Z-A XYZ nano piezo scanning stage