Single-axis Nano Piezo Scanning Stage NPSX-120

Single-axis Nano Piezo Scanning Stage NPSX-120

Single-axis Nano Piezo Scanning Stage NPSX-120

NPSX-120 is a low-cost, compact design model of a nano piezo scanning stage suitable for universal application.

Piezo stages are made of solid metal bar processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. NPS stage design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

NPSX-120 single-axis scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control NPSX-120 piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.

Applications of NPSX-120 include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

Single axis Nano Piezo Scanning Stage NPSX-120 drawingSingle-axis-Nano_Piezo_Scanning-Stage-NPSX-120

Double Cap Technique is used, which greatly improves sensors quality.




Parameters NPSX-120
Travel range (Closed-Loop), µm 120
Resonant frequency, kHz 3
Minimum scan step, nm 0.1
Angle tilting over the full range, nm < 0.01°
Maximum scanning speed, Hz (line/sec) 10
Base sample weight, g 100
Operating temperature range at -40°C to 80°C
Dimensions, mm 33×30×22
Material Aluminium


Ordering information:

Part number Description Price
NPSX-120 Single-axis Nano Piezo Scanning Stage