NPSX-120 is a low-cost, compact design model of a nano piezo scanning stage suitable for universal application.
Piezo stages are made of solid metal bar processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. NPS stage design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.
NPSX-120 single-axis scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.
To control NPSX-120 piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.
Applications of NPSX-120 include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.
Double Cap Technique is used, which greatly improves sensors quality.
|Travel range (Closed-Loop), µm||120|
|Resonant frequency, kHz||3|
|Minimum scan step, nm||0.1|
|Angle tilting over the full range, nm||< 0.01°|
|Maximum scanning speed, Hz (line/sec)||10|
|Base sample weight, g||100|
|Operating temperature range||at -40°C to 80°C|
|NPSX-120||Single-axis Nano Piezo Scanning Stage|