SPM plane-parallel nano piezo scanning stage NPS405Z

SPM plane parallel nano piezo scanning stage NPS405Z

SPM plane parallel nano piezo scanning stage NPS405Z

NPS405Z – basic model of a nano piezo scanning stage. It has high stiffness in all directions, it allows to scan with high speed and resolution, stage is specially designed for SPM applications. NPS405Z XYZ piezo stage are capable of moving the objects with sub-nanometer precision.

Piezo stages are made of solid metal bar processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. NPS stage design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

NPS405Z multi-axes scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control NPS405Z piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.

Applications of NPS405Z include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

SPM plane-parallel nano piezo scanning stage NPS405Z drawing

Double Cap Technique is used, which greatly improves sensors quality.




Parameters NPS405Z
XY travel range (Closed-Loop), µm 40×40
Z range (Closed-Loop), µm 5
Resonant frequency XY, kHz 5
Resonant frequency Z, kHz 50
Minimum scan step, nm 0.1
Angle tilting over the full range, nm < 0.01°
Maximum scanning speed, Hz (line/sec) 50
Base sample weight, g 50
Dimensions, mm 70×62×32.2
Material Aluminium


Ordering information:

Part number Description Price
NPS405Z SPM plane-parallel nano piezo scanning stage