Nano piezo positioning stage NPS20020Z



NPS20020Z – is basic model of a piezo scanning stage. NPS20020Z piezo stage is capable of moving the objects with sub-nanometer precision.

Piezo stages are made of solid metal part processed with EDM wire-cutting and precise CNC machining. Movable central part hangs on flexible springs and is driven with piezo actuators. NPS20020Z design provides excellent linearity and flatness of the movement, in contrast to the classical scanners based on piezoelectric tubes, where the scan surface is a sphere. In addition, plane-parallel scanners have higher mechanical strength, compared with fragile piezoelectric tubes.

NPS20020Z multi-axes scanners are equipped with capacitive displacement sensors for digital closed-loop control. It provides high accuracy and linearity of movement and eliminates the creep effect of piezoceramics. Capacitance measurements are made with TDC (time-to-digital conversion) technology where all measuring electronics is located as close as possible to the sensors. Such a design leads to the low noise and high speed displacement control.

To control NPS20020Z piezo stages universal controllers EG-3000 or EG-1000 are used as well as NSpec software.

Applications of NPS20020Z include scanning probe microscopy (e.g. atomic force microscopy), nanopositioning, metrology, biology research, microelectronics, micromanipulation etc.

Nano piezo positioning stage NPS20020Z drawing

Double Cap Technique is used, which greatly improves sensors quality.




Parameters NPS20020Z NPS20020
XY travel range (Closed-Loop), µm 200×200 200×200
Z range (Closed-Loop), µm 20
Resonant frequency XY, kHz 1 1
Resonant frequency Z, kHz 30
Minimum scan step, nm 0.1 0.1
Angle tilting over the full range, nm < 0.01° < 0.01°
Maximum scanning speed, Hz (line/sec) 10 10
Base sample weight, g 100 100
Operating temperature range at -40°C to 80°C at -40°C to 80°C
Dimensions, mm 100×100×30 100×100×30
Material Aluminium Aluminium


Ordering information:

Part number Description Price
NPS20020Z 3D Piezo Scanning Stage
NPS20020 2D Piezo Scanning Stage